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Thermal decay of ArF-excimer-laser fabricated fiber Bragg gratings in Bi-Al-doped optical fibers

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Hans Georg Limberger, Georgios Violakis, Pouneh Saffari
2012

Abstract

Fiber Bragg Gratings were fabricated using a 193-nm-ArF-excimer laser with ac index changes of 0.6×10E-4 and 2.2×10E-4 in pristine and H2-loaded Bi-Al-SiO2 fibers. Thermal annealing of the FBGs was investigated using continuous isochronal annealing.

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https://infoscience.epfl.ch/entities/publication/0982fde2-f45d-4b6c-a508-8756d076d1ee

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Related concepts (12)

An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining. Since 1960s excimer lasers are widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'.

Argon fluoride laser

The argon fluoride laser (ArF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while "exciplex" is short for "excited complex".

Krypton fluoride laser

A krypton fluoride laser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. An excimer laser typically contains a mixture of: a noble gas such as argon, krypton, or xenon; and a halogen gas such as fluorine or chlorine.

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