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Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

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Tobias Kippenberg, Rui Ning Wang, Junqiu Liu, Anat Siddharth, Maxim Karpov, Mikhail Churaev, Jijun He, Guanhao Huang, Wenle Weng, Arslan Sajid Raja, Miles Henry Anderson, Anton Lukashchuk, Nils Johan Engelsen, Alexey Tikan
2020
conference papers

Abstract

Recent advances in silicon nitride integrated photonics have achieved ultralow optical losses. Transferring this technology to standard commercial foundries, and merging it with silicon photonics via heterogeneous integration, will seed novel laser and quantum applications. (C) 2020 The Author(s)

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https://infoscience.epfl.ch/entities/publication/6f45f4bf-0807-48dd-8ccb-7517559cfdf1

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