Publication
Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 mu m - 25 mu m, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength. (C) 2022 The Author(s)