Analysis of XBAR resonance and higher order spurious modes

A suspended 400nm thin mono-crystalline ZY cut Lithium Niobate (LN) membrane with narrow interdigital electrodes (IDEs) on top having a pitch of the order of few microns excites standing shear bulk acoustic wave resonance (XBAR) within the membrane through lateral field excitation. Recently the first XBAR was simulated and demonstrated experimentally with a resonance frequency of 4800MHz having high electromechanical coupling of about 25% and loaded quality factor at resonance close to 500.

Analysis of XBAR resonance and higher order spurious modes

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Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

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Pivot, process for manufacturing such a pivot, oscillator comprising such a pivot, watch movement and timepiece comprising such an oscillator

Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

A Streamline Upwind Petrov-Galerkin Reduced Order Method for Advection-Dominated Partial Differential Equations Under Optimal Control

Pivot, process for manufacturing such a pivot, oscillator comprising such a pivot, watch movement and timepiece comprising such an oscillator