Concept

Microfabrication

Publications associées (307)

FABRICATION OF NANOAPERTURES ON STENCILS USING FOCUSED ION BEAMS FOR SHADOW MASK EVAPORATION

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Oscar Vazquez Mena

We aim to fabricate stencils with apertures in the sub-micron range

2006

SUB-MICRON SCALE PATTERN TRANSFER INTO POLYMERS BY THERMAL IMPRINT LITHOGRAPHY

Jürgen Brugger, Christian Santschi, Thomas Kiefer, Nao Takano

Nanoimprint lithography (NIL) is an emerging patterning technology which shows the capability of fabricating nanostructures on a large scale. It is therefore interesting for low-cost NEMS manufacturing. As schematically shown, a stamp made of single crysta ...

2006

Emerging Nanopatterning Methods based on MEMS Technology

Jürgen Brugger

The development of nanosystems and nano-devices demands for patterning methods in the nanoscale. To bring them to the market, there is a need for fast, low-cost nanopatterning methods. In addition, an increased flexibility is important for the engineering ...

2006

Modelling pattern transfer in stencil lithography

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

The race to shrink feature sizes requires the limits of conventional lithography to be extended to high-throughput, low cost, reliable and well-controlled processes of which stencilling is a promising candidate for nanoscale applications. Identifying, pred ...

2006

Fabrication and characterisation of ultrasensitive monocrystalline silicon cantilevers with integrated magnetic tips

Alain Dysli

During this project, ultrasensitive cantilevers designed for nuclear magnetic resonance applications were fabricated and characterised. The cantilevers are 500, 340 or 200 μm long, 10 or 20 μm wide and 500 or 340 nm thick and integrate a thin film of cobal ...

2006

Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes

Nico de Rooij, Herbert Shea, Samuel Rosset

We report on the first successfully microfabricated and tested ion-implanted dielectric electroactive polymer (EAP or DEAP) actuators. Dieletric EAP (DEAP) actuators combine exceptionally high energy-density with large amplitude displacements [1,2]. Scalin ...

2006

Application of Microstencil Lithography on Polymer Surfaces for Microfluidic Systems with Integrated Microelectrodes

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart, Nao Takano

Microfluidic systems with incorporated microelectrodes are adopted in a variety of applications in life sciences. However, most of micro-electro-fluidic devices are fabricated based on silicon and silicon related materials micromachining processes, which a ...

2006

Stencil lithography

Marc Antonius Friedrich van den Boogaart

This work describes the advancements made in micro and nano patterning via stencil lithography. Stencil lithography is a resist-less and direct pattern technique where a controlled amount of material is deposited through apertures on to a substrate in a va ...

EPFL2006

SETTING-UP AND EVALUATION OF UV-IMPRINT LITHOGRAPHY

Jürgen Brugger, Thomas Kiefer, Nao Takano

UV-imprint lithography has attracted attentions since its invention in 1996 together with thermal imprint lithography, which are so-called nanoimprint lithography (NIL). One of the characteristics of UV-imprint lithography is that a polymer layer to be str ...

2006

Directed assembling of gold nanoparticles using Van der Waals interactions

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

In the last past years, many promising applications of nanoparticles in quantum electronics such as nanocrystal memories, chemical sensors or nanodevices based on single electron tunneling and Coulomb blockade effects have attracted much attention. Nanopar ...

2006

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