Micromirrors for integrated tunable mid-infrared detectors and emitters
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Tunable resonant cavity enhanced detectors (RCED) have been realised for the mid-infrared (IR). The bottom mirror as well as the photodiode inside the cavity are based on narrow gap IV-VI materials and grown by molecular beam epitaxy (MBE) on Silicon subst ...
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This paper presents continuative results on the design, fabrication and measurements of a vertically moving, electrostatically actuated micromirror, first shown at the IEEE MEMS 2007 [N. Quack, I. Züst, S. Blunier, J. Dual, M. Arnold, F. Felder, M. Rahim, ...
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The realization of a vertically moving micromirror using electrostatic actuation in a comb drive configuration is presented. The micromirror is designed for the use in tunable mid-infrared Resonant Cavity Enhanced Detectors (RCEDs). It can be displaced mor ...
A PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlen ...
This is the first part of the two articles reporting investigation of a thermal detector-type far-infrared sensor operating in the 8–14µm wavelength, using Low-Pressure-Chemical-Vapor-Deposition (LPCVD)- deposited low-stress Si-rich nitride (SiN)membrane a ...
Highly sensitive photodetectors for the mid-infrared have recently been obtained by placing a photodiode inside a Fabry-Pérot cavity (Arnold et al 2005 Appl. Phys. Lett. 87 141103). These resonant cavity enhanced detectors (RCED) are sensitive at the res ...
We review recent results on wafer fused long wavelength VCSELs emitting in the 1310 - 2000 nm range. This technology allows reaching fundamental mode output in excess of 4.5 mW at room temperature and close to 3 mW at 70 degrees C for both the 1310 nm and ...
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