Piezoelectric thin films for bulk acoustic wave resonator applications
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Highly textured PZT(111), PZT(001/100) and random PZT films have been grown on Pt and RuO2 bottom electrodes by means of an in-situ, multimagnetron reactive sputtering process with three metal targets (Pb, Zr, Ti). The orientation was varied with the botto ...
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By using the polynomial formalism, the gain-bandwidth restrictions will be established in the case of the double broadband matching of an RL generator impedance and an RLC load. By using an automatic procedure based on the Gauss-Newton algorithm, the optim ...
The classical analogy between linear filtering and acoustical filtering by tubes is applied in the non-classical case where the tubes are made of unequal-length sections (such as the DRM case). It is shown that the filtering process identity is substantial ...
In this paper, we present a new algorithm for the design of orthonormal two-band rational filter banks. Owing to the connection between iterated rational filter banks and rational wavelets, this is also a design algorithm for orthonormal rational wavelets. ...
The rapidly maturing integrated Kerr microcombs show significant potential for microwave photonics. Yet, state-of-the-art microcomb-based radiofrequency filters have required programmable pulse shapers, which inevitably increase the system cost, footprint, ...
A piezoelectric thin film sandwiched between two conductors is the basic structure for high frequency bulk acoustic wave devices. For that purpose, AlN thin films deposited by DC reactive sputtering on various electrode materials were investigated, Highly ...