Quantum Dots in Silicon: Manufacturing and Integration

This lecture discusses the development of quantum computing in silicon quantum dots, focusing on the integration of millions of qubits using advanced semiconductor manufacturing. Topics include the fabrication process, gate dielectric, transistor design, and the use of silicon spin qubits and transmon qubits. The lecture also covers the architecture, Cryo-CMOS technology, interconnects, and the importance of high impedance resonators in quantum computing. Various techniques such as all-optical lithography and fully industrial processing are explored, highlighting the achievement of nanoscale gate patterns with excellent yield. The lecture emphasizes the significance of fault-tolerant two-qubit gates and the operation of single-spin qubits with long relaxation and coherence times.