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Piezoresistive cantilever array for life sciences applications

Nico de Rooij, Terunobu Akiyama, Peter Vettiger, Laure Aeschimann, André Meister
2007
Journal paper
Abstract

Atomic Force Microscopy (AFM) techniques are used with one- or two-dimensional arrays of piezoresistive probes for parallel imaging. We present a newly designed AFM platform to drive these passivated piezoresistive cantilever arrays in air and liquid environments. Large area imaging in liquid as well as qualitative and quantitative analysis of biological cells are demonstrated by the means of piezoresistive cantilever for the first time to our knowledge. Noise limitations in topography and force resolutions of these piezolevers are quantified. © 2007 IOP Publishing Ltd.

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