Imaging based optofluidic air flow meter with polymer interferometers defined by soft lithography

We present an optofluidic chip with integrated polymer interferometers for measuring both the microfluidic air pressure and flow rate. The chip contains a microfluidic circuit and optical cavities on a polymer which was defined by soft lithography. The pressure can be read out by imaging the interference patterns of the cavities. The air flow rate was then calculated from the differential pressure across a microfluidic Venturi circuit. Air flow rate measurement in the range of 0-2mg/second was demonstrated. This device provides a simple and versatile way for in situ measuring the microscale air pressure and flow on chip. © 2010 Optical Society of America.