An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-side areas of first and second dielectric materials. In one embodiment the first dielectric material is a piezoelectric, in particular the first dielectric material can be a piezoelectric and the second dielectric material can be non-piezoelectric.In another embodiment,the first dielectric material is a piezoelectric of first polarity and the second dielectric material is a piezoelectric of opposite polarity or different polarity. Where needed, the resonant layer is supported on a reflector composed of series of layers of high acoustic impedance material(s) alternating with layers of low acoustic impedance material(s). For example, the reflector comprises AlN,Al2O3, Ta2O5, HfO2or W as high impedance material and SiO2 as low impedance material.
Edoardo Charbon, Pasquale Scarlino, Fabrizio Minganti, Simone Frasca, Marco Scigliuzzo, Vincent Jean Yves Jouanny, Fabian Oppliger, Roberto Musio
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Romain Christophe Rémy Fleury, Amir Jafargholi, Jalaledin Tayebpour