Publication

Heated mask

Jürgen Brugger, Andreea Veronica Savu, Shenqi Xie
2013
Patent

Abstract

The invention concerns a method and a device wherein a stencil is provided with an integrated microhotplate on the stencil membrane to prevent aperture clogging, whereby the stencil can be locally heated up in order to minimize material condensation, remove clogging and control the resolution of the deposited material by deforming the membrane towards or away from a substrate.

Official source

https://infoscience.epfl.ch/record/211839?ln=en

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Heated mask

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Micro- or nanostructured optical element

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