Einfluss von plasma-physikalischen und plasma-chemischen eigenschaften von VHF Silan Plasmen auf die Abscheidung von amorphem und mikrokistallinem Silizium - Projektbericht CRPP, Zweite Etappe 1991-1993

Christoph Hollenstein, Alan Howling, Laurent Fabien Hubert Sansonnens, Joydeep Dutta
1994
Report or working paper

Official source

https://infoscience.epfl.ch/record/213191?ln=en

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