Publication

Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

Tobias Kippenberg, Rui Ning Wang, Guanhao Huang, Anat Siddharth, Mikhail Churaev, Junqiu Liu, Maxim Karpov, Wenle Weng, Arslan Sajid Raja, Jijun He, Miles Henry Anderson, Anton Lukashchuk, Nils Johan Engelsen, Alexey Tikan
2020
Conference paper

Abstract

Recent advances in silicon nitride integrated photonics have achieved ultralow optical losses. Transferring this technology to standard commercial foundries, and merging it with silicon photonics via heterogeneous integration, will seed novel laser and quantum applications. (C) 2020 The Author(s)

Official source

https://infoscience.epfl.ch/record/289487?ln=en

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Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

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