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The present invention relates to an electrically tunable photonic resonator device for a component having a fast and flat actuation response, comprising: - At least one optical waveguide with an optical interface for coupling in laser light, - At least one optical resonator including a waveguide being made of an optical resonator material, particularly Si3N4, wherein laser light coupled via the at least one optical waveguide is coupled into the at least one optical resonator, - At least one piezo actuator to apply mechanical stress at least partially onto the at least one optical resonator; wherein the at least one optical resonator, the at least one piezo actuator and the at least one optical waveguide are monolithically integrated on a common substrate of the photonic resonator device; - a mechanical mode suppression means configured to attenuate one or more mechanical modes of oscillation caused by an AC operation of the at least one piezo actuator.
Tobias Kippenberg, Anat Siddharth
Tobias Kippenberg, Viacheslav Snigirev, Grigorii Likhachev