Course

MICRO-431: Materials and technology of microfabrication

Summary

The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps of deposition, lithography and etching, with a focus on materials and multidisciplinarity.

Official source

https://edu.epfl.ch/coursebook/en/materials-and-technology-of-microfabrication-MICRO-431

Moodle Page

http://go.epfl.ch/MICRO-431

About this result

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Ontological neighbourhood

Chemistry

Physical chemistry: Electrochemistry

Electrical engineering

Electromechanics: Microelectromechanical systems

Instructors (2)

Lectures in this course (14)

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