Related publications (373)

Wafer-level micro-structuring of glassy carbon

Hans Peter Herzig, Toralf Scharf, Karin Prater, Loïc Etienne Hans, Cédric Kilchoer

Glassy carbon is used nowadays for a variety of applicationsbecause of its mechanical strength, thermal stability and non-sticking adhesion properties. One application is glass molding that allows to realize high resolution diffractive optical elements on ...
Spie-Int Soc Optical Engineering2014

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