Related publications (20)

High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

Tobias Kippenberg, Rui Ning Wang, Guanhao Huang, Junqiu Liu, Arslan Sajid Raja, Jijun He, Nils Johan Engelsen, Tianyi Liu

Low-loss photonic integrated circuits and microresonators have enabled a wide range of applications, such as narrow-linewidth lasers and chip-scale frequency combs. To translate these into a widespread technology, attaining ultralow optical losses with est ...
NATURE RESEARCH2021

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