Publications related to Common-mode signal

Porous silicon as new micro material for actuated 3D flip-up structures and its applications in microoptics

Philippe Renaud, Michael Werner, Gerhard Lammel

A new surface micromachining method based on porous silicon formation followed by electropolishing is presented in this paper. It generates in a single electrochemical etch step a plate of porous silicon, releases it from the substrate without using a sacr ...

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