Soft lithography | EPFL Graph Search

In technology, soft lithography is a family of techniques for fabricating or replicating structures using "elastomeric stamps, molds, and conformable photomasks". It is called "soft" because it uses elastomeric materials, most notably PDMS. Soft lithography is generally used to construct features measured on the micrometer to nanometer scale. According to Rogers and Nuzzo (2005), development of soft lithography expanded rapidly from 1995 to 2005. Soft lithography tools are now commercially available. Types

PDMS stamp
Microcontact printing
Multilayer soft lithography
Nanosphere lithography

Advantages Soft lithography has some unique advantages over other forms of lithography (such as photolithography and electron beam lithography). They include the following: *Lower cost than traditional photolithography in mass production *Well-suited for applications in biotechnology *Well-suited for applications in plastic electronics *Well-suited for applications

Fluorophore-doped xerogel antiresonant reflecting optical waveguides

Jürgen Brugger, Victor Javier Cadarso Busto

Rhodamine B and Alexa Fluor 430 fluorophores have been used as doping agents for xerogel waveguides defined over an antiresonant (ARROW) filter. This configuration has a significant level of integration, since it merges the waveguide, the light emitter and the filter in a single photonic element. Different technologies have been combined for their implementation, namely soft lithography, standard silicon-based technology and silicon bulk micromachining. The spectral response of 15-mm long waveguides without fluorophore is first analyzed as a function of the waveguide width. Here, it has been observed how the xerogel used has a high transparency in the visible spectra, having only significant absorption at the wavelength where the ARROW filter is in resonance. In a second step, identical waveguides but doped with two different concentrations of Rhodamine B and Alexa Fluor 430 are studied. In addition to the effect of the filter, fluorophore-doped xerogel waveguides show losses close to 2 dB (equivalent to 2 dB of light emission). In addition, it has been observed how an increase of the fluorophore concentration within the xerogel matrix does not provide with a emission increase, but saturation or even a decrease of this magnitude due to self-absorption. Finally, the total losses of the proposed waveguides are analyzed as a function of their width, obtaining losses close to 5 dB for waveguide widths higher than 50 µm.

Optical Society of America2011

Polymeric variable optical attenuators based on magnetic sensitive stimuli materials

Jürgen Brugger, Victor Javier Cadarso Busto

Magnetically-actuable, polymer-based variable optical attenuators (VOA) are presented in this paper. The design comprises a cantilever which also plays the role of a waveguide and the input/output alignment elements for simple alignment, yet still rendering an efficient coupling. Magnetic properties have been conferred to these micro-opto-electromechanical systems (MOEMS) by implementing two different strategies: in the first case, a magnetic sensitive stimuli material (M-SSM) is obtained by a combination of polydimethylsiloxane (PDMS) and ferrofluid (FF) in ratios between 14.9 wt % and 29.9 wt %. An M-SSM strip under the waveguide-cantilever, defined with soft lithography (SLT), provides the required actuation capability. In the second case, specific volumes of FF are dispensed at the end of the cantilever tip (outside the waveguide) by means of inkjet printing (IJP), obtaining the required magnetic response while holding the optical transparency of the waveguide-cantilever. In the absence of a magnetic field, the waveguide-cantilever is aligned with the output fiber optics and thus the intrinsic optical losses can be obtained. Numerical simulations, validated experimentally, have shown that, for any cantilever length, the VOAs defined by IJP present lower intrinsic optical losses than their SLT counterparts. Under an applied magnetic field (B-app), both VOA configurations experience a misalignment between the waveguide-cantilever and the output fiber optics. Thus, the proposed VOAs modulate the output power as a function of the cantilever displacement, which is proportional to B-app. The experimental results for the three different waveguide-cantilever lengths and six different FF concentrations (three per technology) show maximum deflections of 220 mu m at 29.9 wt % of FF for VOA(SLT) and 250 mu m at 22.3 wt % FF for VOA(IJP), at 0.57 kG for both. These deflections provide maximum actuation losses of 16.1 dB and 18.9 dB for the VOA(SLT) and VOA(IJP), respectively.

Institute of Physics2014

PDMS-based, magnetically actuated variable optical attenuators obtained by soft lithography and inkjet printing technologies

Jürgen Brugger, Victor Javier Cadarso Busto

This paper reports and compares the implementation of magnetic variable optical attenuators (M-VOA) by two fabrication strategies. In the first case, a two-layer structure containing a non-doped polydimethylsiloxane (PDMS) layer on a magnetic PDMS (M-PDMS) layer is fabricated by soft lithography (SLT). M-PDMS is obtained by doping PDMS with different ferrofluid (FF) volumes. The second technology consists of selectively dispense FF microdroplets using the inkjet printing technique (UP) on a non-doped, non-cured PDMS structure, previously defined by SLT. In this second case, FF volumes are encapsulated inside the polymer matrix. The optical and mechanical properties of structures fabricated using both strategies and containing similar ferrofluid amounts are compared. (C) 2014 Elsevier B.V. All rights reserved.

Elsevier2014

Polymeric variable optical attenuators based on magnetic sensitive stimuli materials

Jürgen Brugger, Victor Javier Cadarso Busto

Institute of Physics2014