Concept
Nanolithography
Related courses (11)
MICRO-530: Nanotechnology
This course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.
MSE-619: Nanofabrication with focused electron and ion beams
Nanofabrication with focused charged particle beams (SEM, FIB) and their applications such as lithography, gas assisted deposition / etching, and milling are discussed and the limitations of these pro
MICRO-724: Advanced topics in micro- and nanomanufacturing: top-down meets bottom-up
This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive
CH-413: Nanobiotechnology
This course concerns modern bioanalytical techniques to investigate biomolecules both in vitro and in vivo, including recent methods to image, track and manipulate single molecules. We cover the basic
MICRO-621: MOOC: Micro and Nanofabrication (MEMS)
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC
MICRO-332: Microfabrication practicals
The goal of this course is to introduce students to the practical aspects of some basic micro-fabrication techniques.
MICRO-618: Soft Microsystems Processing and Devices
Amongst others, following topics will be covered during the course:
- Soft Microsystems and Electronics
- Electroactive polymers
- Printed electronics and microsystems
- Inkjet printing of polymers
MICRO-373: Advanced microfabrication practicals
This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small
EE-517: Bio-nano-chip design
Introduction to heterogeneous integration for Nano-Bio-CMOS sensors on Chip.
Understanding and designing of active Bio/CMOS interfaces powered by nanostructures.
EE-532: Integrated circuits technology
This course will give an overview of some of the most relevant aspects of CMOS technology used to design and fabricate integrated circuits.
Current research and challenges brought about by shrinking F