Zhaofu Fei1999, Phd in Chemistry, Braunschweig, Germany,
2002, Lausanne, EPFL, Scientist.
Paul MuraltPaul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award.
Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/) Anders MeibomAnders Meibom obtained his PhD in physics from the University of Southern Denmark in 1997. This was followed by two and a half years of PostDoc work at the Hawaii Institute for Geophysics and Planetology, where he conducted mineralogical studies of primitive chondritic meteorites. From 2000 to 2005, he was Research Associate in the Geological & Environmental Sciences, Stanford University, where he represented Stanford in the USGS-Stanford ion microprobe laboratory. In 2005, he became proifessor at the Muséum National dHistoire Naturelle in Paris. From 2006 to 2011 he was the director of the French national NanoSIMS laboratory. Since January 2012, he is professor at the EPFL in the School of Architecture, Civil and Environmental Engineering (ENAC). From April 2014, he is professor ad personam at the Institute of Earth Sciences, University of Lausanne.
Nico de RooijNico de Rooij is Professor Emeritus of EPFL and previous Vice-President of CSEM SA. He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (
SAMLAB
) from 2009 to 2016. At
CSEM SA
he was responsible for the EPFL CSEM coordination from 2012 to 2016. His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 400 published
journal papers
in these areas.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. Since October 1990 till October 1996 and again from October 2002 until June 2008, he has been the director of the Institute of Microtechnology of the University of Neuchatel (IMT UniNE). He lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ), and since 1989, he has been a part-time professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He has been appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA, from 2008 until 2012. He was Director of EPFL's Institute of Microengineering (EPFL STI IMT) from 2009 to 2012, following the transfer of IMT Uni-NE to EPFL.
Dr. de Rooij is a Fellow of the IEEE and Fellow of the Institute of Physics (UK). He recieved the IEEE
Jun-Ichi Nishizawa Gold Medal
, the Schlumberger Prize as well as the
MNE Fellow Award 2016
. He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by the
A*STAR Science and Engineering Council (SERC)
, Singapore, hosted by
SIMTech
, for the period 2005-2008.
Prof. de Rooij is Corresponding Member of the
Royal Netherlands Academy of Arts and Sciences
and Individual Member of the
Swiss Academy of Engineering Sciences
.
He has been serving on the Editorial Boards of the
IEEE/ASME Journal of Microelectromechanical Systems (IEEE JMEMS)
,
the IEEE proceedings
,
the Journal of Micromechanics and Microengineering, JM & M,
,
the Sensors and Actuators
,and
Sensors and Materials
. He was Member of the Information and Communication technology jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
Dr. de Rooij is (or was) Member of numerous international steering committees of conference series as well as
technical paper review panels including the steering committee of the International Conference on Solid-State
Sensors and Actuators and of Eurosensors. He acted as European Program Chairman of Transducers '87 and General Chairman of Transducers '89, Montreux, Switzerland.
He has supervised more than 70 Ph.D. students, who have successfully completed their
Ph.D. thesis.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
Nava SetterNava Setter completed MSc in Civil Engineering in the Technion (Israel) and PhD in Solid State Science in Penn. State University (USA) (1980). After post-doctoral work at the Universities of Oxford (UK) and Geneva (Switzerland), she joined an R&D institute in Haifa (Israel) where she became the head of the Electronic Ceramics Lab (1988). She began her affiliation with EPFL in 1989 as the Director of the Ceramics Laboratory, becoming Full Professor of Materials Science and Engineering in 1992. She had been Head of the Materials Department in the past and more recently has served as the Director of the Doctoral School for Materials.
Research at the Ceramics Laboratory, which Nava Setter directs, concerns the science and technology of functional ceramics focusing on piezoelectric and related materials: ferroelectrics, dielectrics, pyroelectrics and also ferromagnetics. The work includes fundamental and applied research and covers the various scales from the atoms to the final devices. Emphasis is given to micro- and nano-fabrication technology with ceramics and coupled theoretical and experimental studies of the functioning of ferroelectrics.
Her own research interests include ferroelectrics and piezoelectrics: in particular the effects of interfaces, finite-size and domain-wall phenomena, as well as structure-property relations and the pursuit of new applications. The leading thread in her work over the years has been the demonstration of how basic or fundamental concepts in materials - particularly ferroelectrics - can be utilized in a new way and/or in new types of devices. She has published over 450 scientific and technical papers.
Nava Setter is a Fellow of the Swiss Academy of Technical Sciences, the Institute of Electrical and Electronic Engineers (IEEE), and the World Academy of Ceramics. Among the awards she received are the Swiss-Korea Research Award, the ISIF outstanding achievement award, and the Ferroelectrics-IEEE recognition award. In 2010 her research was recognized by the European Union by the award of an ERC Advanced Investigator Grant. Recently she received the IEEE-UFFC Achievement Award (2011),the W.R. Buessem Award(2011), the Robert S. Sosman Award Lecture (American Ceramics Society) (2013), and the American Vacuum Society Recognition for Excellence in Leadership (2013).
Raymond RouletOriginaire de Peseux (Neuchâtel), Raymond Roulet est né en 1940 au Congo. Il étudie à l'Ecole Polytechnique de l'Université de Lausanne et obtient un diplôme d'ingénieur chimiste en 1963 avec un travail de recherche en chimie analytique. En 1966, l'Université de Lausanne lui confère le doctorat ès sciences avec félicitations du jury pour ses travaux sur la séparation des terres rares par chromatographie sur échangeurs d'ions. Il effectue ensuite un stage postdoctoral au California Institute of Technology (groupe du Prof. H.B. Gray) dans le domaine de la chimie de coordination.
De retour à l'Institut de chimie minérale et analytique de l'UNIL, il y est nommé professeur-assistant en 1971. Il effectue un stage de recherche en chimie organométallique à la Faculté de chimie industrielle de l'Université de Venise en 1974 et l'UNIL le nomme professeur ordinaire à la Faculté des Sciences en 1978. De 1991 à 1999, il a été directeur de l'Institut de chimie minérale et analytique de l'UNIL.
