Concept

Focus variation

Summary
Focus variation is a method used to sharpen images and to measure surface irregularities by means of optics with limited depth of field. Algorithm The algorithm works as follows:

At first images with difference focus are captured. This is done by moving the sample or the optics in relation to each other.

Then for each position the focus over each plane is calculated

The plane with the best focus is used to get a sharp image. the corresponding depth gives the depth at this position-

Optics Focus variation requires an optics with very little depth of field. This can be realized if a microscopy like optics and a microscope objective is used. These objectives have a high numerical aperture which gives a small depth of field. Usage The use of this method is for optical surface metrology and coordinate-measuring machine. This means measuring form, waviness and roughness on samples. With optimized hardware and software components a lateral resolution of 500
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