Concept

Photoresist

Related publications (175)

Electrical conduction of photo-patternable SU8-graphene composites

László Forró, Arnaud Magrez, Claudio Grimaldi, Maryam Majidian, Andrea Pisoni

Graphene-based SU8 nanocomposite is developed as a new conductive polymer, which benefits from remarkable electrical conductivity of graphene, along with photo-pattern-ability and transparency of SU8. Well defined structures with minimal resolution of 10 m ...

Pergamon-Elsevier Science Ltd2014

Nanopore Integrated Nanogaps for DNA Detection

László Forró, Arnaud Magrez, Aleksandra Radenovic, Axel Fanget, Floriano Traversi, Sergey Khlybov

A high-throughput fabrication of sub-10 nm nanogap electrodes combined with solid-state nanopores is described. These devices should allow concomitant tunneling and ionic current detection of translocating DNA molecules. We report the optimal fabrication p ...

American Chemical Society2014

Simple and easily controllable parabolic-shaped microlenses printed on polymeric mesas

Jürgen Brugger, Cristina Martin Olmos, Joo Yeon Kim

A simple and easy shape-controllable approach is demonstrated for the fabrication of parabolic-shaped polymer microlenses (mu-lenses), which are widely used in bio-imaging systems such as microfluidic and lab-on-a-chip systems for improving the image quali ...

Royal Soc Chemistry2013

Simulteanous enzyme immobilisation and micro-nanofabrication process for low-cost biosensor applications

Nico de Rooij, Peter Van der Wal, Sotiria Psoma

Biosensors which are based on BioMEMS combine developments in micro-nanotechnology and biological recognition elements, in order to enable the measurement of low level analyte concentrations with portable detection-systems. A major challenge of such small ...

2013

Post-CMOS Processing and 3-D Integration Based on Dry-Film Lithography

Carlotta Guiducci, Yusuf Leblebici, Yüksel Temiz

This paper presents a chip-level postcomplementary metal oxide semiconductor (CMOS) processing technique for 3-D integration and through-silicon-via (TSV) fabrication. The proposed technique is based on dry-film lithography, which is a low-cost and simple ...

Ieee-Inst Electrical Electronics Engineers Inc2013

Electrical conductivity of multi-walled carbon nanotubes-SU8 epoxy composites

László Forró, Arnaud Magrez, Claudio Grimaldi, Richard Gaal, Marijana Mionic Ebersold

We have characterized the electrical conductivity of the composite which consists of multi-walled carbon nanotubes dispersed in SU8 epoxy resin. Depending on the processing conditions of the epoxy (ranging from non-polymerized to cross-linked), we obtained ...

Amer Inst Physics2013

Application of stencil masks for ion beam lithographic patterning

Jürgen Brugger, Andreea Veronica Savu

The application of Au/Si3N4 stencil masks for the transfer of patterns using different MeV-ion beams with various substrates has been investigated. The techniques investigated were namely, conventional lithography with positive- and negative-tone resist po ...

Elsevier2013

Phenyl-bridged polysilsesquioxane positive and negative resist for electron beam lithography

Jürgen Brugger, Vaida Auzelyte

We present and characterize an organic–inorganic hybrid sol–gel material, phenyl-bridged polysilsesquioxane (ph-PSQ), for use as a new highresolution resist for electron beam lithography (EBL). The resist has a unique characteristic as the only positive to ...

Institute of Physics2012

Memristive-Biosensors: A New Detection Method by Using Nanofabricated Memristors

Giovanni De Micheli, Sandro Carrara, Davide Sacchetto, Yusuf Leblebici, Camilla Baj-Rossi

This paper proposes a new detection methodology based on memristive-effect registered on silicon nanowire. The nano-wires are fabricated by a lithographic technique that allows precise and selective etching at the nanoscale. The wires are obtained in three ...

Elsevier2012

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation

Nico de Rooij, Peter Van der Wal, Sotiria Psoma

A novel one-step microfabrication process of SU-8 films is proposed for developing inexpensive, small size and light-weight optical glucose micro-biosensors. Experimental work was performed in order to investigate whether the widely used in MEMS applicatio ...

2012

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