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Until now, the preferred solution for MEMS (Micro Electro Mechanical Systems) actuation is the electrostatic one. The main reason is that this kind of actuators can be easily manufactured following the microfabrication rules, as their geometry perfectly fi ...
The coupling of stimuli-responsive macromolecules to nanostructured surfaces opens the perspective for the fabrication and integration of "smart" micro- and nano-electro-mechanical systems (MEMS&NEMS) in which the smallest motile unit is the polymeric chai ...
This work describes the advancements made in micro and nano patterning via stencil lithography. Stencil lithography is a resist-less and direct pattern technique where a controlled amount of material is deposited through apertures on to a substrate in a va ...
Production in a controlled environment is becoming an increasingly important issue in various branches of industry. In the food, pharmaceutical, optical and semiconductor industries, today’s mass production would not be possible without so-called “cleanroo ...
A machining process based on Electro Discharge Machining (EDM) has been developed and allows producing flexible and low-cost tweezers-like grippers or grippers shaped for a specific application. It can be easily included in a micromanipulation setup and re ...
Generating large force/displacement actuators at the millimeter and sub-millimeter scales remains an important challenge for microsystems engineers. One promising solution is to integrate high-energy density solid propellant fuels in microsystems (pyroMEMS ...
Titanium oxide due to its optical properties, such as high refractive index, transparency to visible light and photocatalytic properties is being used in a large number of devices such as micro-optical elements and solar cells. The fabrication of TiO2 micr ...
