Concept

Sputtering

Related publications (177)

Photocatalytic indoor/outdoor air treatment and bacterial inactivation on CuxO/TiO2 prepared by HiPIMS on polyester cloth under low intensity visible light

In this study, photoactive CuxO/TiO2 coatings were prepared using magnetron sputtering operated at different powers and modes (Direct-current magnetron sputtering and High Power Impulse magnetron sputtering). Indoor/outdoor air pollutions (Volatile Organic ...

2019

Deciphering the Mechanisms of Bacterial Inactivation on HiPIMS Sputtered CuxO-FeOx-PET Surfaces: From Light Absorption to Catalytic Bacterial Death

Sami Rtimi, Adrien Alexis Paul Chauvet

The production of nontoxic, affordable, and efficient antibacterial surfaces is key to the well-being of our societies. In this aim, antibacterial thin films have been prepared using earth-abundant metals deposited using high-power impulse magnetron sputte ...

2019

Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Paul Muralt, Stefan Mertin, Clemens Benedict Nyffeler, Andrea Mazzalai

Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...

IEEE2019

Dielectric Actuation Techniques at the Nanoscale: Piezoelectricity and Flexoelectricity

Kaitlin Marie Howell

Micro- and nanoelectromechanical systems (MEMS/NEMS) have long shown their potential to disrupt the established technologies. Over the past 15 years, MEMS have become fundamental components in filters, accelerometers, gyroscopes and gas sensors. MEMS are n ...

EPFL2019

Nontrivial evolution of the Sb(111) electronic and atomic structure after ion irradiation

Defects in crystal structure of layered material can modify the surface states. Ion bombardment is a simple way to introduce defects into a crystal lattice in the surface region. Comprehensive scanning tunneling microscopy (STM), low-energy electron diffra ...

ELSEVIER SCIENCE BV2019

Towards a coherent database of thermal boundary conductance at metal/dielectric interfaces

Ludger Weber, Maïté Blank

The thermal boundary conductance (TBC) of metal/dielectric couples was measured for a large variety of metals on silicon, sapphire, and diamond using time domain thermoreflectance and compared to data previously obtained on diamond. In the case of silicon, ...

2019

Modelling of tungsten erosion and deposition in the divertor of JET-ILW in comparison to experimental findings

Olivier Sauter, Ambrogio Fasoli, Basil Duval, Stefano Coda, Jonathan Graves, Yves Martin, Duccio Testa, Patrick Blanchard, Alessandro Pau, Cristian Sommariva, Henri Weisen, Richard Pitts, Yann Camenen, Jan Horacek, Javier García Hernández, Marco Wischmeier, Nicola Vianello, Mikhail Maslov, Federico Nespoli, Yao Zhou, David Pfefferlé, Davide Galassi, Antonio José Pereira de Figueiredo, Jonathan Marc Philippe Faustin, Liang Yao, Dalziel Joseph Wilson, Hamish William Patten, Samuel Lanthaler, Bernhard Sieglin, Otto Asunta

The erosion, transport and deposition of tungsten in the outer divertor of JET-ILW has been studied for an H-Mode discharge with low frequency ELMs. For this specific case with an inter-ELM electron temperature at the strike point of about 20 eV, tungsten ...

ELSEVIER2019

Experiments and modelling for glow discharge plasmas applied to niobium sputter deposition in superconducting radiofrequency cavities

Thibaut François Hugo Richard

Thin film coatings are ubiquitous in modern daily lives, from the semi-conductor industry to aesthetic applications, and rely on the modification of a given material to enhance its surface properties. At CERN (European Organization for Nuclear Research), t ...

EPFL2019

New spiral beam screen design for the FCC-hh injection kicker magnet

Agnieszka Chmielinska

The injection kicker system for the Future Circular Collider (FCC-hh) must satisfy demanding requirements. To achieve low pulse ripple and fast field rise and fall times, the injection system will use ferrite loaded transmission line type magnets. The beam ...

IOP PUBLISHING LTD2019

Al0.83Sc0.17N Contour-Mode Resonators With Electromechanical Coupling in Excess of 4.5%

Paul Muralt, Luis Guillermo Villanueva Torrijo, Andrea Lozzi

In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...

2019

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