Nico de Rooij, Wilfried Noell
We are developing single-crystalline silicon micromirror arrays (MMA) fro future generation infrared multiobject spectroscopy (IR MOS). The micromirrors are 100 mu m x 200 mu m in size and can be tilted by electrostatic actuation yielding a tilt-angle of 2 ...
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2008