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PbZrxT1-x O3 (PZT) films on silicon substrates can be used for various micro mechanical devices. An insitu reactive sputter deposition process at 600°C has been developed for this application. Three magnetron sources with metal targets have been applied si ...
The dielectric behavior and structure of the Sr(Zn1/3Nb2/3)O3-Ba(Zn1/3Nb2/3)O3 solid solution have been investigated with the intention of understanding the relationship between the structural changes and the temperature coefficient of the relative permitt ...
Forward biasing of transparent nanocryst. TiO2 (anatase) films in lithium ion-contg. org. electrolytes leads to rapid and reversible coloration due to electron accumulation and Li+ intercalation in the anatase lattice. Absorption of >90% light throughout t ...
Forward biasing of transparent nanocryst. TiO2 (anatase) films in Li ion contg. org. electrolytes leads to rapid and reversible coloration due to electron accumulation and Li+ intercalation in the anatase lattice. Absorption of > 90% light throughout the v ...
The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the p ...