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Imaging spectroscopy

Related publications (51)

Microfabricated double layer octupoles for microcolumn applications

Nico de Rooij

We report about a new process we have developed to fabricate miniaturized double layer octupoles that can be operated as electrostatic scanner/stigmators for charged particle beams. The fabrication process is based on deep reactive ion etching (DRIE) and a ...
1999

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