Concept

Micromachinery

Related publications (32)

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Jürgen Brugger, Vahid Fakhfouri, Sébastien Jiguet

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-10 ...

2006

Design and fabrication of nanofluidic devices by surfaces micromachining

Nico de Rooij

Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂nm deep, 200̂nm wide and up to 8̂cm long. We demonstrated that different materials, such as silicon nitride, polysilicon and silicon dioxide, combined with ...

2006

Emerging Nanopatterning Methods based on MEMS Technology

Jürgen Brugger

The development of nanosystems and nano-devices demands for patterning methods in the nanoscale. To bring them to the market, there is a need for fast, low-cost nanopatterning methods. In addition, an increased flexibility is important for the engineering ...

2006

Full tungsten and platinum nanoprobes for electrically conducting scanning probe methods

Jürgen Brugger, Johannes Steen

We have developed hybrid AFM probes with SU-8 polymer body and full platinum and tungsten cantilever and tip. The fabrication process uses surface micromachining of a (100) silicon wafer. The metal (platinum or tungsten) is sputter deposited in oxidation s ...

2006

Scanning probe arrays for life sciences and nanobiology applications

Nico de Rooij, Terunobu Akiyama, Peter Vettiger, Laure Aeschimann, André Meister

Various 1D and 2D scanning probe arrays with integrated piezoresistive sensors have been developed in view of nanobiology and life science applications. For such applications, the experiments need usually to be performed under liquid conditions. The probe ...

2006

Special cantilever geometry for the access of higher oscillation modes in atomic force microscopy

Luis Guillermo Villanueva Torrijo

Employing higher oscillation modes of microcantilevers promises higher sensitivity when applied as sensors, for example, for mass detection or in atomic force microscopy. Introducing a special cantilever geometry, we show that the relation between the reso ...

2006

Micro-Four-Point probe based on SU-8 cantilevers

Stephan Keller

The four-point probe is used for the measurement of the resistivity of thin metal or semiconductor films. There is an interest in miniaturization of the probes to obtain higher surface sensitivity, an increased spatial resolution and less damage to the sam ...

2005

Optimization of the fabrication of sealed capacitive transducers using surface micromachining

Paul Muralt

Processing issues for the fabrication of capacitive micromachined ultrasonic transducer (cMUT) arrays have been studied using surface micromachining. This work focuses on the critical steps of process fabrication such as membrane formation, sacrificial lay ...

2004

Small SiN AFM Cantilevers for High Frequency Application

Jürgen Brugger, Johannes Steen

‘Real-time’ nanoscale imaging and single molecule force spectroscopy of bio-chemical specimen based on atomic force microscopy (AFM) requires cantilevers with both low force constant and high-resonant frequency. The required spring constant should be betwe ...

2004

Miniature lamellar grating interferometer based on silicon technology

Nico de Rooij, Hans Peter Herzig, Wilfried Noell, Roland Michaely

We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micro ...

2004

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.