Concept

Thin-film bulk acoustic resonator

Related publications (400)

Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

Tobias Kippenberg, Alberto Beccari, Nils Johan Engelsen

Mechanical resonators are widely used in sensors, transducers and optomechanical systems, where mechanical dissipation sets the ultimate limit to performance. Over the past 15 years, the quality factors in strained mechanical resonators have increased by f ...

Berlin2024

Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

Luis Guillermo Villanueva Torrijo, Silvan Stettler, Marco Liffredo, Nan Xu, Federico Peretti

Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...

2024

Piezoelectric Properties of BiFeO3 Exposed to High Temperatures

Dragan Damjanovic, Xiaolong Li

BiFeO3 is a ferroelectric with a Curie temperature of 830 C-degrees, however, its piezoelectric performance at high temperature remains unclear. The current work reveals a disappearance/recovery of piezoelectricity in BiFeO3 at elevated temperature and upo ...

Weinheim2024

Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Victor Plessky

This work presents the study of suspended Y-cut Lithium Niobate shear bulk acoustic resonators for wide band filter applications in the frequency range of 3.5-4.5GHz. The resonators consist of a Lithium Niobate film with Aluminum top interdigitated electro ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2023

Cavity-Mediated Coupling of Terahertz Antiferromagnetic Resonators

Jean-Philippe Ansermet, Marcin Bialek

Coupling of space-separated resonators is interesting for quantum and communication technologies. In this work, we show that antiferromagnetic resonance in separated parallel-plane slabs of hematite (alpha-Fe2O3) couple cooperatively to terahertz electroma ...

AMER PHYSICAL SOC2023

A 5G n77 Filter Using Shear Bulk Mode Resonator With Crystalline X-cut Lithium Niobate Films

Florian Fernand Hartmann

This paper presents the use of a shear bulk acoustic mode resonator made of a membrane of X-cut lithium niobate (LiNbO3) for ultra-wide band filter applications. Aluminum interdigitated (IDT) electrodes are deposited on top of the LiNbO3 thin film as well ...

IEEE2023

Piezoelectric thin films on Quartz substrate

David Yann Niederhauser

The aim of this project is to deposit a thin film of aluminum nitride (AlN) or aluminum scandium nitride (AlScN) on a quartz substrate showing good piezoelectric properties for use in tuning fork oscillators. Quartz oscillators are commonly used in various ...

2023

Transversal Spurious Mode Suppression in Ultra-Large-Coupling SH0 Acoustic Resonators on YX36 degrees-Cut Lithium Niobate

Luis Guillermo Villanueva Torrijo, Silvan Stettler

This work reports on the design and fabrication of fundamental shear horizontal (SH0) mode acoustic resonators based on a suspended lithium niobate (LNO) film at 1.04 GHz. Due to the large e16 piezoelectric coefficient of YX36 degrees.-cut LNO, fabricated ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2023

NbN films with high kinetic inductance for high-quality compact superconducting resonators

Edoardo Charbon, Pasquale Scarlino, Fabrizio Minganti, Simone Frasca, Marco Scigliuzzo, Vincent Jean Yves Jouanny, Fabian Oppliger, Roberto Musio

Niobium nitride (NbN) is a particularly promising material for quantum technology applications, as it shows the degree of reproducibility necessary for large-scale superconducting circuits. We demonstrate that resonators based on NbN thin films present a o ...

2023

How to Make Elastomers Piezoelectric?

Francis Owusu

Piezoelectrics play a significant role in modern electronics and electric devices. Thermal or mechanical stress on such materials induces a change in polarization generating an electric response, which is the sole effect of why they are so interesting. How ...

WILEY2023

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