Concept

Excimer laser

Related publications (188)

Optically tuneable microcavity in a planar photonic crystal silicon waveguide buried in oxide

Hans Peter Herzig, Ross Stanley, Iwan Märki

We present all-optical tuning and switching of a microcavity inside a two-dimensional photonic crystal waveguide. The photonic crystal structure is fabricated in silicon-on-insulator using complementary metal-oxide semiconductor processing techniques based ...

2005

Complex oxide nanostructures by pulsed laser deposition through nanostencils

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

We achieved parallel nanoscale patterning of ferroelectric complex oxides by pulsed laser deposition through a nanostencil (i.e., through a pattern of apertures in a thin free-standing membrane). Ordered arrays of nanostructured barium titanate (BaTiO3) we ...

2005

Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography

Hans Peter Herzig

We present results of the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography. The advantages of buried waveguide ...

2005

Strain relaxation of epitaxial SrTiO3 thin films on LaAlO3 by two-step growth technique

Nava Setter, Paul Muralt, Alexander Tagantsev, Konstantin Astafiev

Using pulsed-laser deposition, a two-step growth technique was applied to epitaxial SrTiO3 (STO) thin films on LaAlO3 substrates providing a way to obtain an effective strain relaxation in these films otherwise strained due to lattice mismatch between film ...

2005

Structural and dielectric properties of strain-controlled epitaxial SrTiO3 thin films by two-step growth technique

Nava Setter, Paul Muralt, Alexander Tagantsev, Konstantin Astafiev

Structural and dielectric properties of epitaxial SrTiO3 (STO) thin films on LaAlO3 substrates fabricated by a two-step growth technique using pulsed laser deposition were investigated by in situ and ex situ observations in terms of strain relaxation from ...

2005

Pulsed Laser Deposition of Metals on Self-Assembled Monolayers

Jürgen Brugger

(abstract not available on this presentation) ...

2005

Exploring microstencils for sub-micron patterning using pulsed laser deposition

Jürgen Brugger, Johannes Steen

The possibilities of sub-micron patterning by means of microstencils using pulsed laser deposition were investigated. Stencils with circular and elliptical patterns were used, with pore sizes ranging from 1 mum down to 500 nm. Strontium titanate (SrTiO3), ...

2004

Toward a 3-D Camera Based on Single Photon Avalanche Diodes

Edoardo Charbon, Pierre-André Besse, Cristiano Niclass, Alexis Rochas

A 3D imager is presented capable of computing the depth map as well as the intensity scale of a given scene. The heart of the system is a two-dimensional array of single photon avalanche diodes fabricated in standard CMOS technology. The diodes exhibit low ...

2004

Photosensitivity and bragg grating technology for upconversion all-fiber lasers

Marcel Zeller

Fiber lasers are compact lightsources with high intrinsic beam quality and high efficiency. The lasing spectrum ranges from the blue to the near infrared and is achievable using fibers with different dopants and glass compositions. All-fiber lasers are cha ...

EPFL2004

Overtone pre-excitation - infrared multiple photon dissociation under collisional conditions

With a view towards developing a method for molecular laser isotope separation (MLIS) of carbon, silicon and nitrogen, this work investigated the overtone pre-excitation - infrared multiple photon dissociation (OP-IRMPD) of CF3H, SiHCl3 and NH3. The study ...

EPFL2004

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