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Plasma-enhanced chemical vapor deposition

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Plasma-enhanced chemical vapor deposition

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Direct processes in the energy deposition of protons in silicon

Controlled deposition of size-selected silver nanoclusters

Sputter deposited piezoelectric fiber coatings for acousto-optic modulators

PZT thin films for micro sensors and actuators

Influence of nitrogen profile an electrical characteristics of furnace- or rapid thermally nitrided silicon dioxide films

Fabrication and structural analysis of ZnO coated fiber optic phase modulators

From molecules to particles in silane plasmas

Correlation between Transport Properties of a-Si:H Layers and Cell Performances Incorporating these Layers

Partial-depth modulation study of anions and neutrals in low-pressure silane plasmas

Impact of nitrogen deposition on the carbon balance in peatland ecosystems. (Final report to the EC on Projet N° EV5V-CT92-0099 and supplementary project ERBCIPDCT 930029)