René Salathé, Jean-Luc Martin, Franz-Karl Reinhart
Laser generated defects in (Al,Ga) As have been investigated by photochemical wet etching and TEM measurements. Photoetching reveals a 500 nm wide zone in the center of the processed area where according to laser power either a luminescent or a nonradiativ ...
Springer-Verlag (Springer Series in Chemical Physics 39)1984