Concept
Nanoelectromechanical systems
Related people (67)
Jürgen Brugger
I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.
Mihai Adrian Ionescu
Adrian M. Ionescu is Full Professor at the Swiss Federal Institute of Technology, Lausanne, Switzerland. He received the B.S./M.S. and Ph.D. degrees from the Polytechnic Institute of Bucharest, Romania and the National Polytechnic Institute of Grenoble, France, in 1989 and 1997, respectively. He has held staff and/or visiting positions at LETI-CEA, Grenoble, France and INP Grenoble, France and Stanford University, USA, in 1998 and 1999. Dr. Ionescu has published more than 600 articles in international journals and conferences. He received many Best Paper Awards in international conferences, the Annual Award of the Technical Section of the Romanian Academy of Sciences in 1994 and the Blondel Medal in 2009 for contributions to the progress in engineering sciences in the domain of electronics. He is the 2013 recipient of the IBM Faculty Award in Engineering. He served the IEDM and VLSI conference technical committees and was the Technical Program Committee (Co)Chair of ESSDERC in 2006 and 2013. He is a member of the SATW. He is director of the Laboratory of Micro/Nanoelectronic Devices (NANOLAB).
Luis Guillermo Villanueva Torrijo
Guillermo Villanueva is a Tenure Track Assistant Professor at the Ecole Polytechnique Federale de Lausane (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US); and before a post-doc at EPFL-LMIS1. He received his M.Sc. in Physics in Zaragoza (Spain) and his PhD from the UAB in Barcelona (Spain).
Since the start of his PhD (2002), Prof. Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertise from the design and fabrication to the characterization and applicability. He has co-authored more than 75 papers in peer-reviewed journals (h-index of 24 WoK, 32 GoS) and more than 100 contributions to international conferences.
He is serving, or has served, on the program committees of IEEE-NEMS, IEEE-Sensors, MNE, IEEE-FCS and Transducers. He is editor of Microelectronic Engineering. He has co-organized MNE2014 and SNC2015; and he is currently co-organizing the short courses at Transducers 2019 and the 16th International Workshop on Nanomechanical Sensors (NMC2019).
Tobias Kippenberg
Tobias J. Kippenberg is Full Professor of Physics at EPFL and leads the Laboratory of Photonics and Quantum Measurement. He obtained his BA at the RWTH Aachen, and MA and PhD at the California Institute of Technology (Caltech in Pasadena, USA). From 2005- 2009 he lead an Independent Research Group at the MPI of Quantum Optics, and is at EPFL since. His research interest are the Science and Applications of ultra high Q microcavities; in particular with his research group he discovered chip-scale Kerr frequency comb generation (Nature 2007, Science 2011) and observed radiation pressure backaction effects in microresonators that now developed into the field of cavity optomechanics (Science 2008). Tobias Kippenberg is alumni of the “Studienstiftung des Deutschen Volkes”. For his invention of “chip-scale frequency combs” he received he Helmholtz Price for Metrology (2009) and the EFTF Young Investigator Award (2010). For his research on cavity optomechanics, he received the EPS Fresnel Prize (2009). In addition he is recipient of the ICO Prize in Optics (2014), the Swiss National Latsis award (2015), the German Wilhelm Klung Award (2015) and ZEISS Research Award (2018). He is fellow of the APS and OSA, and listed since 2014 in the Thomas Reuters highlycited.com in the domain of Physics. EDUCATION 2009: Habilitation (Venia Legendi) in Physics, Ludwig-Maximilians-Universität München 2004: PhD, California Institute of Technology (Advisor Professor Kerry Vahala) 2000: Master of Science (Applied Physics), California Institute of Technology 1998: BA in Physics, Technical University of Aachen (RWTH), Germany 1998: BA in Electrical Engineering, Technical University of Aachen (RWTH), Germany ACADEMIC POSITIONS 2013 - present: Full Professor EPFL 2010 - 2012: Associate Professor EPFL 2008 - 2010: Tenure Track Assistant Professor, Ecole Polytechnique Federale de Lausanne 2007 - present: Marie Curie Excellent Grant Team Leader, Max Planck Institute of Quantum Optics (Division of Prof.T.W. Hänsch) 2005 - present: Leader of an Independent Junior Research Group, Max Planck Institute 2005- present: Habilitant (Prof. Hänsch) Ludwig-Maximilians-Universität (LMU) 2005-2006: Postdoctoral Scholar, Center for the Physics of Information, California Institute of Technology 2000-2004: Graduate Research Assistant, California Institute of Technology PRIZES AND HONORS: ZEISS Research Award 2018 Fellow of the APS 2016 Klung-Wilhelmy Prize 2015 Swiss Latsis Prize 2014 Selected Thomson Reuters Highly Cited Researcher in Physics, 2014/2015 ICO Prize, 2013 EFTF Young Scientist Award (for "invention of microresonator based frequency combs") 2010 Fresnel Prize of the European Physical Society (for contributions to Optomechanics) 2009 Helmholtz Prize for Metrology (for invention of the monolithic frequency comb) 2009 1st Prize winner of the EU Contest for Young Scientists, Helsinki, Finland. Sept. 1996 Jugend forscht 1st Physics Prize at the German National Science Contest May 1996 FELLOWSHIPS Fellow of the German National Merit Foundation ("Studienstiftung des Deutschen Volkes") 1998-2002 Member of the Daimler-Chysler-Fellowship-Organization 1998-2002 Dr. Ulderup Fellowship 1999-2000 RESEARCH INTERESTS Experimental and theoretical research in photonics, notably high Q optical microcavities and their use in cavity quantum optomechanics and frequency metrology PUBLICATIONS AND OFTEN CITED METRICS*: >70 Publications in peer reviewed journals Researcher Google Profile: http://scholar.google.ch/citations?user=PRCbG2kAAAAJ&hl=en h-Index 54 (Google scholar H: 64, >25,000 citations) Thomson Reuters/Claravite List of Highly Cited Researchers (2014,2015,2016,2017) careful in its use: https://www.aps.org/publications/apsnews/201411/backpage.cfm KEY PUBLICATIONS AND REVIEWS: A. Ghadimi, et al. Elastic strain engineering for ultra high Q nanomechanical oscillators Science, (2018) Trocha, et al. Ultrafast distance measurements using soliton microresonator frequency combs Science, Vol. 359 (2018) [joint work with C. Koos] Pablo-Marin et al. Microresonator-based solitons for massively parallel coherent optical communications Nature (2017) [joint work with C. Koos] V. Brasch, et al. Photonic chip-based optical frequency comb using soliton Cherenkov radiation. Science, vol. 351, num. 6271 (2015) Aspelmeyer, M., Kippenberg, T. J. & Marquardt, F. Cavity optomechanics. Reviews of Modern Physics 86, 1391-1452, (2014) Wilson, D. J. et al. Measurement and control of a mechanical oscillator at its thermal decoherence rate. Nature (2014). Verhagen, E., Deleglise, S., Weis, S., Schliesser, A. & Kippenberg, T. J. Quantum-coherent coupling of a mechanical oscillator to an optical cavity mode. Nature 482, 63-67 (2012). Kippenberg, T. J., Holzwarth, R. & Diddams, S. A. Microresonator-based optical frequency combs. Science 332, 555-559, (2011). Weis, S. et al. Optomechanically induced transparency. Science 330, 1520-1523 (2010). Kippenberg, T. J. & Vahala, K. J. Cavity optomechanics: back-action at the mesoscale. Science 321, 1172-1176, (2008). Del'Haye, P. et al. Optical frequency comb generation from a monolithic microresonator. Nature (2007) Schliesser, A., DelHaye, P., Nooshi, N., Vahala, K. & Kippenberg, T. Radiation Pressure Cooling of a Micromechanical Oscillator Using Dynamical Backaction. Physical Review Letters 97, (2006).
Nico de Rooij
Nico de Rooij is Professor Emeritus of EPFL and previous Vice-President of CSEM SA. He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (
SAMLAB
) from 2009 to 2016. At
CSEM SA
he was responsible for the EPFL CSEM coordination from 2012 to 2016. His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 400 published
journal papers
in these areas.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. Since October 1990 till October 1996 and again from October 2002 until June 2008, he has been the director of the Institute of Microtechnology of the University of Neuchatel (IMT UniNE). He lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ), and since 1989, he has been a part-time professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He has been appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA, from 2008 until 2012. He was Director of EPFL's Institute of Microengineering (EPFL STI IMT) from 2009 to 2012, following the transfer of IMT Uni-NE to EPFL.
Dr. de Rooij is a Fellow of the IEEE and Fellow of the Institute of Physics (UK). He recieved the IEEE
Jun-Ichi Nishizawa Gold Medal
, the Schlumberger Prize as well as the
MNE Fellow Award 2016
. He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by the
A*STAR Science and Engineering Council (SERC)
, Singapore, hosted by
SIMTech
, for the period 2005-2008.
Prof. de Rooij is Corresponding Member of the
Royal Netherlands Academy of Arts and Sciences
and Individual Member of the
Swiss Academy of Engineering Sciences
.
He has been serving on the Editorial Boards of the
IEEE/ASME Journal of Microelectromechanical Systems (IEEE JMEMS)
,
the IEEE proceedings
,
the Journal of Micromechanics and Microengineering, JM & M,
,
the Sensors and Actuators
,and
Sensors and Materials
. He was Member of the Information and Communication technology jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
Dr. de Rooij is (or was) Member of numerous international steering committees of conference series as well as
technical paper review panels including the steering committee of the International Conference on Solid-State
Sensors and Actuators and of Eurosensors. He acted as European Program Chairman of Transducers '87 and General Chairman of Transducers '89, Montreux, Switzerland.
He has supervised more than 70 Ph.D. students, who have successfully completed their
Ph.D. thesis.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
Sebastian Gautsch
Sebastian Gautsch is section adjunct in Microengineering at EPFL. He received his M.A.Sc. Degree in Electronical physics from the University of Neuchâtel, Switzerland in 1998. He did his Ph.D. degree in the field of micro-mechanical systems at the Institute of Microtechnology (IMT), University of Neuchâtel, in 2001. His PHD thesis was done in collaboration with NASAs Jet Propulsion Laboratory (JPL) in Pasadena and led to the successful operation of an Atomic Force Microscope on the Phoenix Mission to the Planet Mars in 2008. This achievement had a broad impact in the media. In parallel to his research activities he pursued an international swimming career until 2003. He then acquired the Federal Certificate in Sport Coaching in 2007 delivered by the Swiss Olympic Federation and coached the Elite Swimming Team of Red-Fish Neuchâtel between 2004 and 2009. He was instrumental in initiating and coordinating the Cantonal Olympic Project to support potential olympians. He was part of the coaching delegation at several international events for the Swiss Swimming National Team and qualified more than 20 swimmers for European, World Championships and the Olympic Games of Beijing in 2008. Between 2004 and 2013 he successfully led the research activities in the field of Tools for Nanoscience at the Institute of Microengineering of EPFL at the Sensors, Actuators and Microsystems Laboratory (SAMLAB) of Prof. Nico de Rooij. In 2011, he led the R&D activities in Electron Beam Lithography for the Centre Suisse d'Electronique et de Microtechnique (CSEM). He was instrumental in creating the Swiss Chapter of the Mars Society in 2011 and is currently Vice President. Between 2011 and 2018 he lectured at the Bern University of Applied Science in the field of Micro and Medical Technology.Between 2012 and 2020 he coordinated the Industrial Internships Program for Master students at the School of Engineering. He was instrumental in setting up coordinated master thesis in industry, the Engineering Industry Day, and the sustainable internships label. Between 2018 and 2020 he coordinated academic outreach initiatives like the E3 research internship program and the Engineering PhD Summit . Google Scholar publication page:
Klaus Kern
Klaus Kern is Professor of Physics at EPFL and Director and Scientific Member at the Max-Planck-Institute for Solid State Research in Stuttgart, Germany. He also is Honorary Professor at the University of Konstanz, Germany. His present research interests are in nanoscale science, quantum technology and in microscopy at the atomic limits of space and time. He holds a chemistry degree and PhD from the University of Bonn and a honorary doctors degree from the University of Aalborg. After his doctoral studies he was staff scientist at the Research Center Jülich and visiting scientist at Bell Laboratories, Murray Hill before joining the Faculty of EPFL in 1991 and the Max-Planck-Society in 1998. Professor Kern has authored and coauthored close to 700 scientific publications, which have received nearly 60‘000 citations. He has served frequently on advisory committees to universities, professional societies and institutions and has received numerous scientific awards and honors, including the 2008 Gottfried-Wilhelm-Leibniz Prize and the 2016 Van‘t Hoff Prize. Prof. Kern has also educated a large number of leading scientists in nanoscale physics and chemistry. During the past twenty-five years he has supervised one hundred PhD students and sixty postdoctoral fellows. Today, more than fifty of his former students and postdocs hold prominent faculty positions at Universities around the world.