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Wet Etching: Thin Films and Microfabrication
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Wet Etching: Crystal Structure and Anisotropy
Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.
Thermo-mechanical Micro-actuator: Case Study
Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.