Covers the principles of Scanning Electron Microscopy, including SEM signals, detectors, and energy spectrum of electrons, as well as the efficiency of X-ray generation.
Explores failure mechanisms in MEMS, covering design, manufacturing, and in-use failures, emphasizing reliability considerations and mitigation strategies for mechanical shock and vibration resistance.
Explores glass microfabrication techniques, including precision machining and ultrasonic machining, focusing on mechanical properties and fracture behavior.
