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Covers the principles and applications of Transmission Electron Microscopy, including imaging, diffraction, contrast mechanisms, and in situ techniques.
Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.
Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.
Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.
