Electrostatic MEMS: Scaling Laws & Simulations

This lecture covers the scaling laws and simulations in micro and nanosystems, focusing on electrostatic MEMS. It discusses the energy density in capacitors, parallel plate capacitance, voltage fluctuations, capacitance sensing, and parallel plate electrostatic actuators. The lecture also explores the limitations and challenges in downscaling capacitive sensing, as well as the energy density constraints imposed by breakdown fields in insulators. Additionally, it delves into the design and functionality of parallel plate electrostatic actuators, emphasizing the importance of electrode area, insulator thickness, and breakdown fields. The presentation concludes with a practical application of an electrostatic clutch in haptic gloves for virtual and augmented reality experiences.