Lecture
MEMS and Cleanroom Inspection
Description
This lecture covers the inspection and metrology of MEMS devices in cleanroom environments, focusing on optical and electrical characterization techniques, thin film characterization, and advanced measurement methods such as SEM, FIB, and AFM. It also discusses the scientific study of measurement, calibration, standards, and the validation of devices to ensure they meet design specifications. The instructor provides insights into the importance of metrology in guaranteeing device functionality and shares resources for further exploration.
Official source
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