Glass Microfabrication: Mechanical Structuring

This lecture covers the mechanical structuring techniques used in glass microfabrication, focusing on precision mechanical machining, ultrasonic machining (USM), and abrasive jet machining. It discusses the mechanical properties of materials, including the elastic modulus, hardness, toughness, and fracture behavior of glass. The lecture explains the concepts of defect-controlled strength, fracture mechanics, and the Griffith theory of brittle fracture. It also explores the principles and applications of ultrasonic machining, highlighting its advantages in microfabrication processes. Various examples and case studies are presented to illustrate the practical aspects of glass microfabrication.