Quantum and Nanocomputing: Lithography and Simulation Techniques
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.
Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Explores interferometers' applications, lithography techniques, and nanostructure creation using interference lithography and EUV interference lithography.
