Failure Mechanisms in MEMS

This lecture covers the main failure mechanisms in MEMS, including design phase, manufacturing, and in-use failures. It discusses failure modes related to design, material, manufacturing, and in-use conditions, emphasizing the importance of reliability considerations from the initial design stage. The lecture also delves into the characterization of material properties, such as tensile strength, for both brittle and ductile materials. Various fracture models and mitigation strategies for mechanical shock and vibration resistance in MEMS devices are explored, highlighting the significance of proper material choice, geometry optimization, and controlled processing to enhance reliability and robustness.