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Stefano Benagli

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Related publications (2)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Role of i layer deposition parameters on the V0c and FF of an a-Si:H solar cell deposited by PECVD at 27.13 MHz

Arvind Shah, Juliette Ballutaud, Cédric Bucher, Stefano Benagli

A study of the i-layer porosity as a function of the deposition parameters by PECVD technique, is presented here. It is demonstrated in particular, that for a fixed deposition rate of 2 Å/s, increasing the plasma power tends to increase the layer density, ...

2003

High Efficiency p-i-n a-Si:H Solar Cells with Low Boron Cross-Contamination Prepared in a Large Area Single-Chamber PECVD Reactor

Christoph Hollenstein, Alan Howling, Arvind Shah, Juliette Ballutaud, Cédric Bucher, Stefano Benagli

In this work, a new type of short water vapor treatment of the interface between the p- and i-layer is presented. This novel treatment is performed under vacuum below 1 mbar for 5 min and considerably reduces the i-layer boron contamination in amorphous si ...

2004