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Stefano Benagli

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Stefano Benagli

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Recent Developments of High Efficiency Micromorph tandem solar cells in KAI-M PECVD reactors

Reduction of the boron cross-contamination for plasma deposition of p–i–n devices in a single-chamber large area radio-frequency reactor

High Efficiency p-i-n a-Si:H Solar Cells with Low Boron Cross-Contamination Prepared in a Large Area Single-Chamber PECVD Reactor

Recent Developments of High Efficiency Micromorph tandem solar cells in KAI-M PECVD reactors

Reduction of the boron cross-contamination for plasma deposition of p–i–n devices in a single-chamber large area radio-frequency reactor

High Efficiency p-i-n a-Si:H Solar Cells with Low Boron Cross-Contamination Prepared in a Large Area Single-Chamber PECVD Reactor