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Bandpass filters for microwave frequencies realized with thin film bulk acoustic wave resonators (FBAR) are a promising alternative to current dielectric or surface acoustic wave filters for use in mo
Frequency shift, design, and fabrication issues have been investigated for the realization of 8 GHz handpass filters based on AlN thin film bulk acoustic wave resonators. Fabrication includes well-tex
The mass sensitivity of an AlN thin film resonators operated in air at 6-8 GHz has been investigated in theory and experiment. The 30 x 30 mu m wide resonators included a 180-300 nm thick, highly orie