Publications by Alan Howling | EPFL Graph Search

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Power laws for the spatial dependence of electrical parameters in the high-voltage capacitive RF sheath

Applications of the cavity ring-down technique to a large-area rf-plasma reactor

Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry

Dust particle diagnostics in rf plasma deposition of silicon and silicon oxide films

Degree of dissociation measured by FTIR absorption spectroscopy applied to VHF silane plasmas

A voltage uniformity study in large-area reactors for RF plasma deposition

Partial-depth modulation study of anions and neutrals in low-pressure silane plasmas

Sheath impedance effects in very high frequency plasma experiments

From molecules to particles in silane plasmas

Anionic clusters in dusty hydrocarbon and silane plasmas