Femtosecond pulses focused in glass substrate induces various modifications in the material depending on the fluence level and laser exposure conditions. Upon increasing pulse energies above the energy threshold for non-linear absorption, femtosecond laser ...
In this chapter, the use of femtosecond laser to fabricate glass-based microsystems and sensors is examined. Several advanced technology demonstrators are presented, including some very unusual fused silica MEMS. Present technological barriers are discusse ...
Springer Berlin Heidelberg2011
Recently, it was demonstrated that femtosecond lasers pulses with energies below the ablation threshold locally enhance the etching rate of fused silica: regions that are exposed to the laser beam are etched faster. This remarkable property has been used f ...
Micro-molding can be used for the cost-effective fabrication of elements such as active or passive components in MEMS devices, hydrophobic surfaces, cell-growth scaffolds or optical components such micro-lens arrays and gratings. This method is also partic ...
SPIE-INT SOC OPTICAL ENGINEERING2011
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Simultaneous spatial and temporal focusing (SSTF) provides precise control of the pulse front tilt (PFT) necessary to achieve nonreciprocal writing in glass wherein the material modification depends on the sample scanning direction with respect to the PFT. ...
Laser assisted catalytic chemical vapor deposition has recently emerged as an attractive method for locally growing carbon nanotubes (CNTs) in a cold wall reactor. So far, reported laser assisted CNT growth has been carried out without in situ process moni ...
We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. W ...
2010
The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology – like other serial processes – su ...
The rapid identification of algae species is not only of practical importance when monitoring unwanted adverse effects such as eutrophication, but also when assessing the water quality of watersheds. Here, we demonstrate a lab-on-a-chip that functions as a ...