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Sylvain Lecoultre

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Related publications (11)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Resonant planar antenna as an inductive plasma source

Christoph Hollenstein, Alan Howling, Philippe Frédérique Bruno Guittienne, Sylvain Lecoultre

A resonant planar antenna as an inductive plasma source operating at 13.56 MHz inside a low pressure vacuum vessel is presented for potential plasma processing applications. Its principle consists in interconnecting elementary resonant meshes composed of i ...

2012

Plasma generation by inductive coupling with a planar resonant RF network antenna

Christoph Hollenstein, Alan Howling, Philippe Frédérique Bruno Guittienne, Sylvain Lecoultre

A planar antenna operating at 13.56MHz is presented for potential applications in plasma processing. It consists of interconnected elementary resonant meshes composed of inductive and capacitive elements. Due to its structure, the antenna exhibits a set of ...

2012

Plasma generation by inductive coupling with a planar resonant RF network antenna (vol 45, 082001, 2012)

Christoph Hollenstein, Alan Howling, Philippe Frédérique Bruno Guittienne, Sylvain Lecoultre

Iop Publishing Ltd2012