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Hannes Schmidt

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Related publications (5)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

Characterization of a high-density, large-area VHF plasma source

Feasibility Study of Shaped Electrode The objective of this project was a feasibility study of a novel, large-area plasma reactor for thin film production, based on a shaped electrode technique ("lens") to compensate the standing wave non-uniformity. Cyli ...

EPFL2006

Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformity

Christoph Hollenstein, Alan Howling, Laurent Fabien Hubert Sansonnens, Hannes Schmidt

The electromagnetic standing wave effect can become the main source of nonuniformity limiting the use of very high frequency in large area reactors exceeding 1 m(2) required for industrial applications. Recently, it has been proposed and shown experimental ...

2006

Application of the shaped electrode technique to a large area rectangular capacitively-coupled plasma reactor to suppress standing wave nonuniformity

Christoph Hollenstein, Alan Howling, Laurent Fabien Hubert Sansonnens, Hannes Schmidt

2005