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Peter Vettiger

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Micromachined photoplastic probe for scanning near-field optical microscopy

All-photoplastic, soft cantilever cassette probe for scanning force microscopy

Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications

Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

SU-8: a low-cost negative resist for MEMS